Simple Assembling Technique of Single-Walled Carbon Nanotubes Using Only A Photolithography

Title
Simple Assembling Technique of Single-Walled Carbon Nanotubes Using Only A Photolithography
Authors
김경헌김태근이석전영민김선호변영태
Keywords
SWCNT; FET; SAM; Photolithography
Issue Date
2011-05
Publisher
Journal of the Korean Physical Society
Citation
VOL 58, NO 5, 1380-1383
Abstract
In this paper, a novel technique for the assembly of single-walled carbon nanotubes (SWCNTs), and which was demonstrated using only a photolithographic process without additional chemical steps, is proposed. In this new process, unlike the conventional self-assembled process using octadecyltrichlorosilane (OTS), the SWCNTs could be selectively absorbed on a SiO2/Si substrate. First of all, the selectively assembled channels of the SWCNTs were fabricated on the SiO2 surface for a field effect transistor (FET). We finally fabricated SWCNT-based FETs by using our proposed technique. This technique will provide a useful basis for the implementation of various FET devices with SWCNT channels.
URI
http://pubs.kist.re.kr/handle/201004/39885
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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