Effect of microstructure on electrical properties of thin film alumina capacitor with metal electrode

Title
Effect of microstructure on electrical properties of thin film alumina capacitor with metal electrode
Authors
정명선주병권오영제이전국
Keywords
alumina film capacitor; electroless nickel plating; alumina nano structure; palladium; polyethylene glycol
Issue Date
2011-06
Publisher
한국재료학회지; Korean Journal of Materials Research
Citation
VOL 21, NO 6, 309-313
Abstract
The power capacitors used as vehicle inverters must have a small size, high capacitance, high voltage, fast response and wide operating temperature. Our thin film capacitor was fabricated by alumina layers as a dielectric material and a metal electrode instead of a liquid electrolyte in an aluminum electrolytic capacitor. We analyzed the micro structures and the electrical properties of the thin film capacitors fabricated by nano-channel alumina and metal electrodes. The metal electrode was filled into the alumina nano-channel by electroless nickel plating with polyethylene glycol and a palladium catalyst. The spherical metals were formed inside the alumina nano pores. The breakdown voltage and leakage current increased by the chemical reaction of the alumina layer and PdCl2 solution. The thickness of the electroless plated nickel layer was 300 nm. We observed the nano pores in the interface between the alumina layer and the metal electrode. The alumina capacitors with nickel electrodes had a capacitance density of 100 nF/㎠, dielectric loss of 0.01, breakdown voltage of 0.7MV/cm and leakage current of 104 μA.
URI
http://pubs.kist.re.kr/handle/201004/40092
ISSN
1225-0562
Appears in Collections:
KIST Publication > Article
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