Effect of etching morphology on electrochemical characteristics of modified silicon thick film anode for lithium secondary batteries

Title
Effect of etching morphology on electrochemical characteristics of modified silicon thick film anode for lithium secondary batteries
Authors
김정섭변동진이중기
Issue Date
2011-11
Publisher
International Confeence on Advanced Electromaterials
Abstract
Electrochemical characteristics of surface modified silicon thick film anodes having different etching depth were investigated for lithium secondary batteries. The silicon film with thickness of c.a. 2 μm was deposited on a copper foil by plasma enhanced chemical vapor deposition (PE-CVD) at fixed condition. The etched silicon thick film was prepared by a metal-assisted chemical etching with 1M HF+0.01M H2O2. Etched depth was controlled by different etching time. The cross sectional images observed 1 and 1.8 μm etching depth by scanning electron microscopy (SEM). The electrochemical characteristics were studied using a galvanostatic charge-discharge tester. The electrochemical performance of etched silicon film showed better cycle retention than bare silicon thick film. The silicon film with 1.8 μm etching depth indicated best cycle performance compared with silicon film of 1 μm etching depth.
URI
http://pubs.kist.re.kr/handle/201004/40835
Appears in Collections:
KIST Publication > Conference Paper
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