Effect of etching morphology on electrochemical characteristics of modified silicon thick film anode for lithium secondary batteries
- Effect of etching morphology on electrochemical characteristics of modified silicon thick film anode for lithium secondary batteries
- 김정섭; 변동진; 이중기
- Issue Date
- International Confeence on Advanced Electromaterials
- Electrochemical characteristics of surface modified silicon thick film anodes having different etching depth
were investigated for lithium secondary batteries. The silicon film with thickness of c.a. 2 μm was deposited
on a copper foil by plasma enhanced chemical vapor deposition (PE-CVD) at fixed condition. The etched
silicon thick film was prepared by a metal-assisted chemical etching with 1M HF+0.01M H2O2. Etched depth
was controlled by different etching time. The cross sectional images observed 1 and 1.8 μm etching depth by
scanning electron microscopy (SEM). The electrochemical characteristics were studied using a galvanostatic
charge-discharge tester. The electrochemical performance of etched silicon film showed better cycle retention
than bare silicon thick film. The silicon film with 1.8 μm etching depth indicated best cycle performance
compared with silicon film of 1 μm etching depth.
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