Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread

Title
Influence of substrate temperature on the electrical and optical properties of Ga-doped ZnO thin films fabricated by continuous composition spread
Authors
정근최원국윤석진김현재최지원
Keywords
Electrical conductivity; Optical properties; ZnO; Electrodes
Issue Date
2012-01
Publisher
Ceramics international
Citation
VOL 38S, S605-S608
Abstract
The electrical and optical properties of Ga-doped ZnO (GZO) thin films deposited at different substrate temperatures have been studied by a continuous composition spread (CCS) method. The full range of GZO compositions deposited at different substrate temperatures was explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 9.6 x 10-4 Ω cm and an average transmittance above 89% in the 400–700 nm wavelength regions were able to be formed at a substrate temperature of 100 ℃. Optimized composition of the GZO thin film which had the lowest resistivity and highest transmittance was found at 0.8 wt% Ga2O3 doped ZnO.
URI
http://pubs.kist.re.kr/handle/201004/40872
ISSN
0272-8842
Appears in Collections:
KIST Publication > Article
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