Dielectric properties of continuous composition spreaded MgO-Ta2O5 thin films

Title
Dielectric properties of continuous composition spreaded MgO-Ta2O5 thin films
Authors
김윤회송종한김진상윤석진박경봉최지원
Keywords
High-k; Thin films; Continuous composition spread; RF magnetron sputtering
Issue Date
2011-11
Publisher
Applied surface science
Citation
VOL 258, NO 2, 843-847
Abstract
The dielectric properties of MgO&#8211;Ta2O5 continuous composition spread (CCS) thin films were investigated. The MgO&#8211;Ta2O5 CCS thin films were deposited on Pt/Ti/SiO2/Si substrates by off-Axis RF magnetron sputtering system, and then the films were annealed at 350 ℃ with rapid thermal annealing system in vacuum. The dielectric constant and loss of MgO&#8211;Ta2O5 CCS thin films were plotted via 1500 micron-step measuring. The specific point of Ta2O5&#8211;MgO CCS thin film (post annealed at 350 ℃) showing superior dielectric properties of high dielectric constant (k ~ 28) and low dielectric loss (tan ı < 0·004) at 1 MHz were found in the area of 3&#8211;5 mm apart from Ta2O5 side on the substrate. The cation’s composition of thin film was Mg:Ta - 0.4:2 at%.
URI
http://pubs.kist.re.kr/handle/201004/40874
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE