Characterization of the Mechanical Properties of Diamond-like Carbon Films

Title
Characterization of the Mechanical Properties of Diamond-like Carbon Films
Authors
조성진정진원이광렬
Keywords
diamond-like carbon; mechanical properties; residual compressive stress; elastic modulus; structural evolution
Issue Date
2005-08
Publisher
Diamond and related materials
Citation
VOL 14, 1270-1276
URI
http://pubs.kist.re.kr/handle/201004/40905
ISSN
0925-9635
Appears in Collections:
KIST Publication > Article
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