Chemical reaction of sputtered Cu film with PI modified by low energy reactive atomic beam

Title
Chemical reaction of sputtered Cu film with PI modified by low energy reactive atomic beam
Authors
박종용정연식조정최원국
Keywords
low energy atomic beam; surface energy; Cu adhesion; polyimide; X-ray induced Auger emission spectra; Peel strength
Issue Date
2006-06
Publisher
Applied surface science
Citation
VOL 252, NO 16, 5877-5891
URI
http://pubs.kist.re.kr/handle/201004/40918
ISSN
0169-4332
Appears in Collections:
KIST Publication > Article
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