Chemical reaction of sputtered Cu film with PI modified by low energy reactive atomic beam
- Chemical reaction of sputtered Cu film with PI modified by low energy reactive atomic beam
- 박종용; 정연식; 조정; 최원국
- low energy atomic beam; surface energy; Cu adhesion; polyimide; X-ray induced Auger emission spectra; Peel strength
- Issue Date
- Applied surface science
- VOL 252, NO 16, 5877-5891
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- KIST Publication > Article
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