Synthesis of Cyanato-functional Polymaleimides and Their Application to Negative-tone Photoimaging by Post-crosslinking

Title
Synthesis of Cyanato-functional Polymaleimides and Their Application to Negative-tone Photoimaging by Post-crosslinking
Authors
이찬우김준우이재형안광덕
Keywords
maleimide monomers; maleimide polymers; Cyanato-phenylmaleimide; Cyanate resins; Deprotection of polymers; Functional maleimide polymers; Negative photoimaging; Crosslinking; Functional maleimide monomers
Issue Date
2009-10
Publisher
Reactive & functional polymers
Citation
VOL 69, NO 10, 737-742
Abstract
A cyanato-functional maleimide monomer (CyOPMI) was radically copolymerized with N-[4-(tetrahydropyranyloxy) phenyl]maleimide (THPPMI) and methyl methacrylate (MMA) to obtain reactive cyanate polymers along with acid-labile THP-protecting groups. The soluble copolymers of CyOPMI, employed as cyanato-imidopolymers, were converted to the insoluble polymers by thermal or photo-acid treatment based on the acid-catalyzed deprotection of THP groups and cyclotrimerization of the pendent cyanto groups to form a crosslinked triazine structure (cyanurate). Upon this selective post-crosslinking, the cyanato- polymers were applied to negative-tone photoimaging by photolithography. CyOPMI was radically copolymerized with various vinyl monomers such as MMA, styrenes (St) and alkyl vinyl ethers (R’VE) to obtain soluble polymers by controlling the monomer feed ratios and polymerization conditions. The high thermal properties of the cyanato-imido polymers were attributed to the curing characteristics of the pendant cyanatophenyl and imidophenolic groups.
URI
http://pubs.kist.re.kr/handle/201004/40939
ISSN
1381-5148
Appears in Collections:
KIST Publication > Article
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