Enhancement of electrical properties in Al-doped ZnO films by turning dc bias voltage during radio frequency magnetron sputtering

Title
Enhancement of electrical properties in Al-doped ZnO films by turning dc bias voltage during radio frequency magnetron sputtering
Authors
노영수박동희김태완최지원바사바라 안가디최원국
Keywords
Structural property; Optical property; Al-doped ZnO; Electrodeposition
Issue Date
2011-10
Publisher
International Symposium on Transparent Conductive Coatings
URI
http://pubs.kist.re.kr/handle/201004/41085
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE