Characteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron

Title
Characteristics of Al:doped ZnO thin films by HIPIMS (High Power Impulse Magnetron sputtering) with unbalanced magnetron
Authors
박동희양정도최지원최원국
Keywords
Zinc Oxide; Transparent conducting oxide; HIPIMS
Issue Date
2011-10
Publisher
International Symposium on Transparent Conductive Coatings
URI
http://pubs.kist.re.kr/handle/201004/41086
Appears in Collections:
KIST Publication > Conference Paper
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