Growth of SiC nanowire using HMDS and APCVD on Si substrate

Title
Growth of SiC nanowire using HMDS and APCVD on Si substrate
Authors
노대호김재수변동진이재훈김나리
Keywords
HMDS; SIC nanowire; APCVD
Issue Date
2005-09
Publisher
EUROMAT2005
URI
http://pubs.kist.re.kr/handle/201004/41534
Appears in Collections:
KIST Publication > Conference Paper
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