Fabrication process and properties of PZT thick film cantilevers for bio sensing application

Title
Fabrication process and properties of PZT thick film cantilevers for bio sensing application
Authors
박재홍권태윤윤대성김태송김환
Keywords
thick film; cantilever
Issue Date
2005-11
Publisher
한국센서학회 종합학술대회
Citation
, 127-128
URI
http://pubs.kist.re.kr/handle/201004/41535
Appears in Collections:
KIST Publication > Conference Paper
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