Fabrication and Analysis of the Gate-All-Around (GAA) Structure Silicon Nanowire MOSFET

Title
Fabrication and Analysis of the Gate-All-Around (GAA) Structure Silicon Nanowire MOSFET
Authors
박재현송재영김종필김상완오정훈류경창김가람김현우박병국
Keywords
Gate-All-Around (GAA); locally formed silicon nanowire; Short-Channel Effect (SCE); inverted sidewall spacers; reduction method; self-aligned structure
Issue Date
2009-06
Publisher
IEEE 2009 Silicon Nanoelectronics Workshop
URI
http://pubs.kist.re.kr/handle/201004/41688
Appears in Collections:
KIST Publication > Conference Paper
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