600 mm wide linear stationary plasma thruster (LSPT) for a large area ion beam modification

Title
600 mm wide linear stationary plasma thruster (LSPT) for a large area ion beam modification
Authors
박동희최원국
Keywords
linear stationary plasma thruster; ion beam modification; polymer surface; ion current density
Issue Date
2010-10
Publisher
Society of Vacuum Coater
Citation
, 37-39
Abstract
Stationary plasma thruster (SPT) has advantages of high efficiency of gas ionization, low ion beam energy, charge neutralization effect, and stable operation. It has been researched as an applicable ion source for surface modification. While conventional SPTs have a circular shape for an efficient trapped electron motion along a ceramic channel, 600 mm wide horsetrack shaped linear stationary plasma thruster (LSPT) is newly developed. With electromagnetic winding coil, magnetic field of discharge region is optimized by magnetic field simulation code. Argon ion beam current density is measured to be more than 0.2 mA/㎠ and is saturated at discharge voltage higher than 280V. Min/Max ratio of beam current is about 0.7 in the long axis and 0.9 in the short axis.
URI
http://pubs.kist.re.kr/handle/201004/41734
Appears in Collections:
KIST Publication > Conference Paper
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