Exploring Nanomechanical Behavior of Silicon Nanowires: AFM Bending Versus Nanoindentation

Title
Exploring Nanomechanical Behavior of Silicon Nanowires: AFM Bending Versus Nanoindentation
Authors
김용재손광수최인철최인석박원일장재일
Keywords
Nanomechanics; Si nanowire; AFM bending; nanoindentation
Issue Date
2011-01
Publisher
Advanced functional materials
Citation
VOL 21, NO 2, 279-286
Abstract
Despite many efforts to advance the understanding of nanowire mechanics, a precise characterization of the mechanical behavior and properties of nanowires is still far from standardization. The primary objective of this work is to suggest the most appropriate testing method for accurately determining the mechanical performance of silicon nanowires. To accomplish this goal, the mechanical properties of silicon nanowires with a radius between 15 and 70 nm (this may be the widest range ever reported in this research fi eld) are systematically explored by performing the two most popular nanomechanical tests, atomic force microscopy (AFM) bending and nanoindentation, on the basis of different analytical models and testing conditions. A variety of nanomechanical experiments lead to the suggestion that AFM bending based on the line tension model is the most appropriate and reliable testing method for mechanical characterization of silicon nanowires. This recommendation is also guided by systematic investigations of the testing environments through fi nite element simulations. Results are then discussed in terms of the sizedependency of the mechanical properties; in the examined range of nanowire radius, the elastic modulus is about 185 GPa without showing signifi cant size dependency, whereas the nanowire strength dramatically increases from 2 to 10 GPa as the radius is reduced.
URI
http://pubs.kist.re.kr/handle/201004/41903
ISSN
1616-301X
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KIST Publication > Article
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