A route to high sensitivity and rapid response Nb2O5-based gas sensors: TiO2 doping, surface embossing, and voltage optimization

Title
A route to high sensitivity and rapid response Nb2O5-based gas sensors: TiO2 doping, surface embossing, and voltage optimization
Authors
문희규장호원김진상박형호윤석진
Keywords
Nb2O5; Gas sensors; TiO2 doping; Embossed; Voltage optimization
Issue Date
2011-03
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 153, NO 1, 37-43
Abstract
We report a novel route for the fabrication of highly sensitive and rapidly responding Nb2O5-based thin film gas sensors. TiO2 doping of Nb2O5 films is carried out by co-sputtering without the formation of secondary phases and the surface area of TiO2-doped Nb2O5 films is increased via the use of colloidal templates composed of sacrificial polystyrene beads. The gas sensitivity of Nb2O5 films is enhanced through both the TiO2 doping and the surface embossing. An additional enhancement on the gas sensitivity is obtained by the optimization of the bias voltage applied between interdigitated electrodes beneath Nb2O5-based film. More excitingly, such a voltage optimization leads to a substantial decrease in response time. Upon exposure to 50 ppm CO at 350 ℃, a gas sensor based on TiO2-doped Nb2O5 film with embossed surface morphology exhibits a very high sensitivity of 475% change in resistance and a rapid response time of 8 s under 3V, whereas a sensor based on plain Nb2O5 film shows a 70% resistance change and a response time of 65 s under 1V. Thermal stability tests of our Nb2O5-based sensor reveal excellent reliability which is of particular importance for application as resistive sensors for a variety gases.
URI
http://pubs.kist.re.kr/handle/201004/41904
ISSN
0925-4005
Appears in Collections:
KIST Publication > Article
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