Nanoporous structures of polyimide induced by Ar ion beam irradiation
- Nanoporous structures of polyimide induced by Ar ion beam irradiation
- 아메드 파룩; 이광렬; 윤주일; 문명운
- Ar ion beam; polyimide; nanopattern; friction; 3D porous nanostructure; Hardness
- Issue Date
- Applied surface science
- VOL 258, NO 8, 3841-3845
- The surface morphology evolution of polyimide (PI) that was treated with an Ar ion beam was explored
using a hybrid ion beam system. A hole-like nanostructure formed on PI during the Ar ion beam treatment
at a lower fluence, but PI formed 3D porous nanostructures with a mean diameter of
∼90 nm at a higher
fluence. The chemical binding energy and the composition of the Ar ion irradiated PI were analyzed using
FT-IR and XPS spectra, which revealed that the polymer chain scissioning increased with increasing Ar
ion treatment duration, i.e., fluence. The surface hardness and the elastic modulus of PI increased from
1.17 to 1.62 GPa and 4.06 to 5.41 GPa, respectively, with respect to the Ar ion beam treatment duration.
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