Free-standing silicon nanorods on copper foil as anode for lithium-ion batteries
- Free-standing silicon nanorods on copper foil as anode for lithium-ion batteries
- 히유; Jong Choo Lim; 이중기
- Lithium-ion battery anode; Silicon nanorod; Metal-assisted chemical etching
- Issue Date
- Microelectronic engineering
- VOL 89, 138-140
- A Si thick film with a thickness of ca. 2 lm was deposited on a copper substrate by electron cyclotron
resonance–chemical vapor deposition (ECR–CVD) under a mixture of silane (SiH4) and argon (Ar) gases.
The surface modification of the silicon anode was carried out by the metal-assisted chemical etching
method. Observation by SEM showed that the silicon on the copper substrate had a nanorod structure
as the result of the etching process. The electrochemical performance of the anode prepared using the
free-standing Si nanorods showed a specific capacity of more than 2000 mAh/g with 84% of the discharge
capacity remaining ever after 25 cycles of charge and discharge, as compared with 35% of the discharge
capacity remaining for the pristine Si thick film.
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