Nano-patterning on end-facet of optical fiber for nano-particle manipulation

Title
Nano-patterning on end-facet of optical fiber for nano-particle manipulation
Authors
강동훈김진식장지혜이상엽박정호신현준
Keywords
optical fiber; nano patterning; surface plasmon polariton; Optical trapping; E-beam lithography; Nano sized particle manipulation
Issue Date
2012-04
Publisher
제14회 한국 MEMS 학술대회
Citation
, 259-260
Abstract
Nano-particle manipulation using optical trapping on end-facet of optical trapping require nano patterning technology at endfacet of optical fiber. We tried to confirm a nano pattern using Focused Ion Beam (FIB) and e-beam lithography. FIB method can easily make nano pattern at narrow optical fiber tip. E-beam lithography needs uniformly and thickness controllable e-beam resister (ER) spreading method. 'Air-gun blowing method' is introduced in this paper. We control the blowing pressure, blowing point and time. Finally, we can get controllable thickness of ER at end-facet of optical fiber.
URI
http://pubs.kist.re.kr/handle/201004/42323
Appears in Collections:
KIST Publication > Conference Paper
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