Fabrication and characteristics of out-of-plane piezoelectric

Title
Fabrication and characteristics of out-of-plane piezoelectric
Authors
전창성박준식이상렬문찬우
Keywords
PZT cantilever; Micro gripper; Piezoelectric actuator; MEMS
Issue Date
2007-04
Publisher
Thin solid films
Citation
VOL 515, NO 12, 4901-4904
URI
http://pubs.kist.re.kr/handle/201004/42520
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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