Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition

Title
Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition
Authors
심준호윤호규나상현김인선곽순종
Keywords
flexible display; plastic substrate; poly(ether sulfone); gas barrier; silicon oxynitride; undercoat
Issue Date
2008-03
Publisher
Surface & coatings technology
Citation
VOL 202, NO 13, 2844-2849
URI
http://pubs.kist.re.kr/handle/201004/42527
ISSN
0257-8972
Appears in Collections:
KIST Publication > Article
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