Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition
- Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition
- 심준호; 윤호규; 나상현; 김인선; 곽순종
- flexible display; plastic substrate; poly(ether sulfone); gas barrier; silicon oxynitride; undercoat
- Issue Date
- Surface & coatings technology
- VOL 202, NO 13, 2844-2849
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- KIST Publication > Article
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