Optimization and characterization of 600V super junction power MOSFET using a deep trench structure

Title
Optimization and characterization of 600V super junction power MOSFET using a deep trench structure
Authors
김용태정은식강이구
Keywords
Power device; Breakdown Voltage; Deep trench; Super junction; MOSFET
Issue Date
2012-06
Publisher
Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2012)
Citation
, 16-21
URI
http://pubs.kist.re.kr/handle/201004/42763
Appears in Collections:
KIST Publication > Conference Paper
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