LPCVD Synthesis of High Crystalline Hexagonal Boron Nitride Using Pure Borazine

Title
LPCVD Synthesis of High Crystalline Hexagonal Boron Nitride Using Pure Borazine
Authors
조현진김성관강상욱김환철김명종
Keywords
hexagonal boron nitride; CVD; synthesis
Issue Date
2012-08
Publisher
Nano Korea 2012 Graphene Symposium
Abstract
Pure borazine (B3N3H6) was effectively synthesized via nanoparticle-catalyzed dehydrogenation of ammonia borane and used as a stable molecular precursor for CVD synthesis of hexagonal boron nitride (white graphene). The large area and high crystalline h-BN nano sheets have been synthesized on a polished nickel foil by low pressure chemical vapor deposition. Single to few layered h-BN nano sheets were acquired when pure borazine (B3N3H6) and ammonia (NH3) gas were used at the optimal ratio between two gases at 1000 oC. From the advantage of pure and stable molecular precursor, the number of h-BN layer could be tuned by adjusting ammonia (NH3) partial pressure relative to borazine. Layer-controlled and high crystalline h-BN synthesis was supported by the data measured from SEM, TEM, Raman, EELS and NBED.
URI
http://pubs.kist.re.kr/handle/201004/43001
Appears in Collections:
KIST Publication > Conference Paper
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