Simple, Large-Scale Patterning of Hydrophobic ZnO Nanorod Arrays
- Simple, Large-Scale Patterning of Hydrophobic ZnO Nanorod Arrays
- 김성빈; 이원우; 이재석; 박원일; 김진상; William T. Nichols
- ZnO nanorods; hydrothermal; nanosphere lithography; hydrophobic
- Issue Date
- ACS Applied Materials & Interfaces
- VOL 4, NO 8, 3910-3915
- Here we describe a simple, versatile technique to produce large-scale arrays of highly ordered ZnO nanorods. Patterning of three distinct ZnO crystal morphologies is demonstrated through use of different ZnO seed layers. Array formation is accomplished through a simple variation on nanosphere lithography that imprints a thickness variation across a PMMA mask layer. The area of exposed seed layer is controlled through etching time in an oxygen plasma. Subsequent hydrothermal growth from the patterned seed layer produces high-quality ZnO crystals in uniform arrays. The high uniformity of the patterned array is shown to induce a high contact angle hydrophobic state even without the need for chemical modification of the ZnO surface. This technique provides a straightforward way to integrate the optical and electrical properties of high-quality ZnO nanorods with the tunable fluidic properties at the surface of well-ordered arrays.
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