Oxygen plasma post process to obtain consistent conductance of carbon nanotubes in carbon nanotube field-effect transistors
- Oxygen plasma post process to obtain consistent conductance of carbon nanotubes in carbon nanotube field-effect transistors
- 장지웅; 변영태; 우덕하; 이석; 전영민
- adsorption; carbon nanotube field effect transistors; carbon nanotubes; electrical conductivity; monolayers; plasma materials processing; self-assembly
- Issue Date
- Applied physics letters
- VOL 101, NO 17, 173104-1-173104-4
- We modified the conductance of carbon nanotubes (CNTs) in carbon nanotube field-effect
transistors by oxygen plasma post process (OPPP) to obtain consistent conductance after the CNTs
were adsorbed by self-assembly monolayer method which is suitable for large scale mass production
but hardly yields consistent conductance due to various complex factors involved. We have shown
that the conductance of the CNTs can be tuned from 47 μS to zero by varying the OPPP time from
0 to 15 s. The reduction rate of the conductance was 9.8%/s implying that a tenth of the CNTs
was removed every second.
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