Atomistic simulations of diamond-like carbon growth
- Atomistic simulations of diamond-like carbon growth
- 조민웅; 문명운; 이광렬
- molecular dynamics; diamond-like carbon; amorphous carbon; subplanatation; thermal spike; surface roughening
- Issue Date
- Thin solid films
- VOL 521, 239-244
- Diamond-like carbon (DLC) films are composed of carbon bonds with different hybridizations, including sp2,
sp3 and even sp1. Understanding the atomic bonding structure is essential to understanding the properties
and optimizing the process parameters of the films. Because of the limited analytical tools for characterizing
the atomic bonding structure in amorphous materials, computational research at the atomistic scale could
provide significant insight into the structure–property relationships in diamond-like carbon films and has
been applied to understanding the various phenomena occurring during DLC film growth. The contributions
of the atomistic simulations and electronic structure calculations pertain mainly to three important issues:
(i) the sp3 bond formation and stress generation mechanisms, (ii) the stress reduction mechanism by
metal incorporation, and (iii) the impact angle-dependent surface smoothening/roughening mechanisms.
- Appears in Collections:
- KIST Publication > Article
- Files in This Item:
There are no files associated with this item.
- RIS (EndNote)
- XLS (Excel)
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.