Fabrication of suspended thin film resonator for application of RF bandpass filter

Title
Fabrication of suspended thin film resonator for application of RF bandpass filter
Authors
김현호주병권이윤희이시형이전국김수원
Issue Date
2004-02
Publisher
Microelectronics Reliability
Citation
VOL 44, NO 2, 237-243
URI
http://pubs.kist.re.kr/handle/201004/43508
ISSN
0026-2714
Appears in Collections:
KIST Publication > Article
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