High-resolution inchworm linear motor based on electrostatic twisting microactuators

Title
High-resolution inchworm linear motor based on electrostatic twisting microactuators
Authors
김상호황일환조경우윤의성이종현
Keywords
MEMS; microactuator; linear motor; electro static
Issue Date
2005-07
Publisher
Journal of Micromechanics and Microengineering
Citation
VOL 15, NO 8, 1674-1682
URI
http://pubs.kist.re.kr/handle/201004/43528
ISSN
0960-1317
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE