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dc.contributor.author김상호-
dc.contributor.author황일환-
dc.contributor.author조경우-
dc.contributor.author윤의성-
dc.contributor.author이종현-
dc.date.accessioned2015-12-03T00:52:14Z-
dc.date.available2015-12-03T00:52:14Z-
dc.date.issued200507-
dc.identifier.citationVOL 15, NO 8, 1674-1682-
dc.identifier.issn0960-1317-
dc.identifier.other20995-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/43528-
dc.publisherJournal of Micromechanics and Microengineering-
dc.subjectMEMS-
dc.subjectmicroactuator-
dc.subjectlinear motor-
dc.subjectelectro static-
dc.titleHigh-resolution inchworm linear motor based on electrostatic twisting microactuators-
dc.typeArticle-
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