Oxidation Behavior of Tungsten in H2O2- and Fe(NO3)3-Base Aqueous Slurries

Title
Oxidation Behavior of Tungsten in H2O2- and Fe(NO3)3-Base Aqueous Slurries
Authors
임건자이종호손지원이해원김주선
Keywords
CMP; Tungsten
Issue Date
2006-05
Publisher
Journal of the Electrochemical Society
Citation
VOL 153, NO 5, B169-B172
URI
http://pubs.kist.re.kr/handle/201004/43582
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE