Pattern size dependence of Si1-xGex epitaxial growth for high mobility device applications

Title
Pattern size dependence of Si1-xGex epitaxial growth for high mobility device applications
Authors
이주영김형준Mingqiang BaoKang L. Wabg
Keywords
molecular beam epitaxy (MBE)
Issue Date
2006-06
Publisher
Thin solid films
Citation
VOL 508, NO 1-2, 10-13
URI
http://pubs.kist.re.kr/handle/201004/43618
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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