Stress development of direct-patternable PZT film for applying to micro-detecting system

Title
Stress development of direct-patternable PZT film for applying to micro-detecting system
Authors
Sang Woo Bae강지윤Hyung-Ho Park김태송
Issue Date
2006-12
Publisher
Journal of electroceramics
Citation
VOL 17, NO 2-4, 805-809
URI
http://pubs.kist.re.kr/handle/201004/43637
ISSN
1385-3449
Appears in Collections:
KIST Publication > Article
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