RF capacitively coupled plasma with multi-hole multi electrode

Title
RF capacitively coupled plasma with multi-hole multi electrode
Authors
이헌수이윤성서상훈장홍영
Keywords
Plasma; CCP; electron density
Issue Date
2011-11
Publisher
GEC
URI
http://pubs.kist.re.kr/handle/201004/43706
Appears in Collections:
KIST Publication > Conference Paper
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