Spatial control of RF capacitively coupled plasma using divided multi-holed electrode

Title
Spatial control of RF capacitively coupled plasma using divided multi-holed electrode
Authors
이헌수이윤성장홍영
Issue Date
2012-02
Publisher
한국진공학회
URI
http://pubs.kist.re.kr/handle/201004/43708
Appears in Collections:
KIST Publication > Conference Paper
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