A capacitively coupled plasma discharge with segmented multi-holed electrode on large area

Title
A capacitively coupled plasma discharge with segmented multi-holed electrode on large area
Authors
이헌수이윤성장홍영
Issue Date
2012-07
Publisher
ICMAP
URI
http://pubs.kist.re.kr/handle/201004/43709
Appears in Collections:
KIST Publication > Conference Paper
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