X-ray photoelectron spectroscopy of Zn0.98Cu0.02O thin film grown on ZnO seed layer by RF sputtering

Title
X-ray photoelectron spectroscopy of Zn0.98Cu0.02O thin film grown on ZnO seed layer by RF sputtering
Authors
Ankush VijSanjeev Gautam원성옥Anup Thakur이익재채근화
Keywords
Thin film; X-ray photoelectron spectroscopy; Oxygen vacancies
Issue Date
2012-12
Publisher
Materials letters
Citation
VOL 88, 51-53
Abstract
We report the synthesis and electronic structure study of ZnCuO nanocrystalline thin film grown on ZnO seed layer by RF magnetron sputtering. X-ray diffraction (XRD) pattern reveals the single phase wurtzite structure preferentially grown along c-axis, while crystallite size using Debye Scherer’s relation was calculated to be 10 nm. The scanning electron microscopy (SEM) depicts a columnar structure with a dense distribution of grains. X-ray photoelectron spectroscopy (XPS) of sputter-cleaned surface reveals a better stoichiometry and reduced oxygen vacancies in comparison to the as-deposited film. The Cu 2p core level spectrum ensures the Cu doping and suggests that Cu exists as Cu2+ and a mixture of Cu2+/Cu+ at the surface of as-deposited and sputter-cleaned film, respectively.
URI
http://pubs.kist.re.kr/handle/201004/43746
ISSN
0167577X
Appears in Collections:
KIST Publication > Article
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