Processing Technique for Single-Walled Carbon Nanotube-Based Sensor Arrays

Title
Processing Technique for Single-Walled Carbon Nanotube-Based Sensor Arrays
Authors
김경헌장지웅김태근이석김선호변영태
Keywords
SWCNT; Photolithography; FET Arrays; SAM; Sensor
Issue Date
2012-02
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 12, NO 2, 1251-1255
Abstract
We investigated a selective assembly method of fabricating single-walled carbon nanotubes (SWCNTs) on a silicon-dioxide (SiO2) surface by using only a photolithographic process; then, we fabricated 8×8 field-emission transistor (FET) arrays for sensor applications. Photoresist (PR) patterns were made on a SiO2-grown Si substrate by using the photolithographic process. This PR-patterned substrate was dipped into a SWCNT solution dispersed in dichlorobenzene (DCB). The PR patterns were removed by using acetone. As a result, selectively-assembled SWCNT channels in 8×8 FET arrays could be fabricated between source and drain electrodes without complicated chemical steps using octadecyltrichlorosilane (OTS). Finally, we successfully fabricated 8×8 SWCNT-based multi-channel FET arrays by using our novel self-assembly method.
URI
http://pubs.kist.re.kr/handle/201004/43788
ISSN
15334880
Appears in Collections:
KIST Publication > Article
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