Processing Technique for Single-Walled Carbon Nanotube-Based Sensor Arrays
- Processing Technique for Single-Walled Carbon Nanotube-Based Sensor Arrays
- 김경헌; 장지웅; 김태근; 이석; 김선호; 변영태
- SWCNT; Photolithography; FET Arrays; SAM; Sensor
- Issue Date
- Journal of nanoscience and nanotechnology
- VOL 12, NO 2, 1251-1255
- We investigated a selective assembly method of fabricating single-walled carbon nanotubes
(SWCNTs) on a silicon-dioxide (SiO2) surface by using only a photolithographic process; then,
we fabricated 8×8 field-emission transistor (FET) arrays for sensor applications. Photoresist (PR)
patterns were made on a SiO2-grown Si substrate by using the photolithographic process. This
PR-patterned substrate was dipped into a SWCNT solution dispersed in dichlorobenzene (DCB).
The PR patterns were removed by using acetone. As a result, selectively-assembled SWCNT channels
in 8×8 FET arrays could be fabricated between source and drain electrodes without complicated
chemical steps using octadecyltrichlorosilane (OTS). Finally, we successfully fabricated 8×8
SWCNT-based multi-channel FET arrays by using our novel self-assembly method.
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