Measurement of Young’s modulus of anisotropic materials using microcompression testing

Title
Measurement of Young’s modulus of anisotropic materials using microcompression testing
Authors
최인석Gan YixiangDaniel KaufmannKraft OliverSchwaiger Ruth
Issue Date
2012-11
Publisher
Journal of materials research
Citation
VOL 27, NO 21, 2752-2759
Abstract
Microcompression test was applied to determine the Young’s modulus for elastically anisotropic materials for two different orientations of single crystalline Si. Although there is a clear difference in the apparent Young’s moduli for the different orientations, a significant underestimation of Young’s modulus was observed resulting from the substrate deformation as observed in both finite element simulation and experiment. This effect decreases with increasing aspect ratio. To correct the deviation of the apparent Young’s modulus from the theoretical values, a systematic framework of microcompression test is suggested. The modified Sneddon correction using the indentation modulus instead of Young’s modulus successfully yields Young’s moduli of single crystalline silicon in the [100] and [111] directions to within 5.3% and 2.0% deviation, respectively.
URI
http://pubs.kist.re.kr/handle/201004/43938
ISSN
08842914
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KIST Publication > Article
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