Measurement of Young’s modulus of anisotropic materials using microcompression testing
- Measurement of Young’s modulus of anisotropic materials using microcompression testing
- 최인석; Gan Yixiang; Daniel Kaufmann; Kraft Oliver; Schwaiger Ruth
- Issue Date
- Journal of materials research
- VOL 27, NO 21, 2752-2759
- Microcompression test was applied to determine the Young’s modulus for elastically anisotropic
materials for two different orientations of single crystalline Si. Although there is a clear difference
in the apparent Young’s moduli for the different orientations, a significant underestimation of
Young’s modulus was observed resulting from the substrate deformation as observed in both finite
element simulation and experiment. This effect decreases with increasing aspect ratio. To correct
the deviation of the apparent Young’s modulus from the theoretical values, a systematic framework
of microcompression test is suggested. The modified Sneddon correction using the indentation
modulus instead of Young’s modulus successfully yields Young’s moduli of single crystalline
silicon in the  and  directions to within 5.3% and 2.0% deviation, respectively.
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