Characteristics of fluorine-doped tin oxide (SnO2:F) thin films deposited on PET for transparent heater
- Characteristics of fluorine-doped tin oxide (SnO2:F) thin films deposited on PET for transparent heater
- 김아영; 박지훈; 최원창; 변동진; 이중기
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- Transparent heaters based on AZO/FTO double layer films were prepared by electro cyclotron resonance - metal organic chemical vapor deposition (ECR-MOCVD) and RF-sputtering system. Double layered transparent conducting oxide (TCO) film has been designed and fabricated to achieve both high conductivity and high heat property. This double layered structure has the low sheet resistance which leads to increase of grain size. After double layer deposition, the AZO/FTO films show sheet resistance as low as ~18.75 Ohm/sq with ~75% optical transmittance, which are ideal as low-voltage transparent heaters. Furthermore, this method enabled the control of the AZO/FTO double layer films over the optical and electrical properties, which are related to effect of oxygen flow rate. Hall measurement results show the double layer film has a remarkable increase in mobility and a decrease in resistivity. In addition, time-dependent temperature profiles shows that the performance of AZO/FTO double layer with 33 sccm oxygen flow rate is superior to that of FTO single layer heaters.
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