Characteristics of fluorine-doped tin oxide (SnO2:F) thin films deposited on PET for transparent heater

Title
Characteristics of fluorine-doped tin oxide (SnO2:F) thin films deposited on PET for transparent heater
Authors
김아영박지훈최원창변동진이중기
Issue Date
2012-11
Publisher
한국전기화학회
Abstract
Transparent heaters based on AZO/FTO double layer films were prepared by electro cyclotron resonance - metal organic chemical vapor deposition (ECR-MOCVD) and RF-sputtering system. Double layered transparent conducting oxide (TCO) film has been designed and fabricated to achieve both high conductivity and high heat property. This double layered structure has the low sheet resistance which leads to increase of grain size. After double layer deposition, the AZO/FTO films show sheet resistance as low as ~18.75 Ohm/sq with ~75% optical transmittance, which are ideal as low-voltage transparent heaters. Furthermore, this method enabled the control of the AZO/FTO double layer films over the optical and electrical properties, which are related to effect of oxygen flow rate. Hall measurement results show the double layer film has a remarkable increase in mobility and a decrease in resistivity. In addition, time-dependent temperature profiles shows that the performance of AZO/FTO double layer with 33 sccm oxygen flow rate is superior to that of FTO single layer heaters.
URI
http://pubs.kist.re.kr/handle/201004/44038
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE