Piezoelectric properties of highly densified 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y2O3+1.5 wt% ZnO thick films on alumina substrate

Title
Piezoelectric properties of highly densified 0.01Pb(Mg1/2W1/2)O3-0.41Pb(Ni1/3Nb2/3)O3-0.35PbTiO3-0.23PbZrO3+0.1 wt% Y2O3+1.5 wt% ZnO thick films on alumina substrate
Authors
신태희하종윤송현철윤석진박형호최지원
Keywords
Piezoelectric thick film; screen printing; particle size control; cold isostatic pressing
Issue Date
2013-03
Publisher
Ceramics international
Citation
VOL 39, NO 2, 1327-1333
Abstract
This paper reports on the formation of highly densified piezoelectric thick films of 0.01Pb(Mg1/2W1/2)O3–0.41Pb(Ni1/3Nb2/3)O3– 0.35PbTiO3–0.23PbZrO3þ0.1 wt% Y2O3þ1.5 wt% ZnO (PMW–PNN–PT–PZþYZ) on alumina substrate by the screen-printing method. To increase the packing density of powder in screen-printing paste, attrition milled nano-scale powder was mixed with ball milled micro-scale powder, while the particle size distribution was properly controlled. Furthermore, the cold isostatic pressing process was used to improve the green density of the piezoelectric thick films. As a result of these processes, the PMW–PNN–PT–PZþYZ thick film, sintered at 890 1C for 2 h, showed enhanced piezoelectric properties such as Pr=42 μC/㎠, Ec=25 kV/cm, and d33=100 pC/N, in comparison with other reports. Such prominent piezoelectric properties of PMW–PNN–PT–PZþYZ thick films using bi-modal particle distribution and the CIP process can be applied to functional thick films in MEMS applications such as micro actuators and sensors.
URI
http://pubs.kist.re.kr/handle/201004/44143
ISSN
02728842
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KIST Publication > Article
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