Ladder-like Polymethylsilsesquioxane (PMSQ) for Interlayer Dielectric (ILD) Application

Title
Ladder-like Polymethylsilsesquioxane (PMSQ) for Interlayer Dielectric (ILD) Application
Authors
이희승황승상백경열
Issue Date
2012-10
Publisher
222nd ECS meeting
URI
http://pubs.kist.re.kr/handle/201004/44181
Appears in Collections:
KIST Publication > Conference Paper
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