Highly Ordered Large-Area Colloid Templates for Nanostructured TiO2 Thin Film Gas Sensors

Title
Highly Ordered Large-Area Colloid Templates for Nanostructured TiO2 Thin Film Gas Sensors
Authors
문희규심영석김도홍장호원한승희박형호윤석진
Keywords
Gas Sensor; TiO2; Colloid Template; O2 Plasma; Hollow Hemispheres
Issue Date
2012-04
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 12, NO 4, 3496-3500
Abstract
We report a novel process that uses highly ordered colloidal templating to fabricate nanostructured TiO2 thin film gas sensors. An O2 plasma treatment is used to decrease the contact angle of a water droplet on a SiO2/Si substrate from 46° to 3°. The formation of this hydrophilic surface enhances the adhesion of polystyrene microspheres to the substrate during the spin coating of the colloidal solution, leading to a large-area colloid template of closely packed monolayer microspheres on the substrates. Embossed TiO2 thin film gas sensors fabricated through highly ordered colloidal templating using O2 plasma exhibit substantially enhanced gas sensing performance as compared to those without surface treatments prior to colloidal templating.
URI
http://pubs.kist.re.kr/handle/201004/44182
ISSN
15334880
Appears in Collections:
KIST Publication > Article
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