Microstructure of study of cubic boron nitride thin film deposited by UBM method with hydrogen addition

Title
Microstructure of study of cubic boron nitride thin film deposited by UBM method with hydrogen addition
Authors
고지선박종극이욱성허주열백영준
Issue Date
2012-04
Publisher
ICMCTF 2012
URI
http://pubs.kist.re.kr/handle/201004/44233
Appears in Collections:
KIST Publication > Conference Paper
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