The effects of nitrogen bonding on hardness of AlN/CrN multilayer hard coatings
- The effects of nitrogen bonding on hardness of AlN/CrN multilayer hard coatings
- 윤상원; 서종현; 채근화; 박종극; 송종한; Vickram Jayaram; 이건배; 성태연; 권훈; 안재평
- AlN/CrN; NEXAFS; Multilayer Hard coating; Bilayer thickness; Broken nitrogen bond
- Issue Date
- Journal of nanoscience and nanotechnology
- VOL 12, NO 2, 1476-1479
- AlN/CrN multilayer hard coatings with various bilayer thicknesses were fabricated by a reactive
sputtering process. The microstructural and mechanical characterizations of multilayer coatings
were investigated through transmission electron microscope (TEM) observations and the hardness
measurements by nano indentation. In particular, the variation of chemical bonding states of the
bilayer nitrides was elucidated by near edge X-ray absorption fine structure (NEXAFS) spectroscopy.
Many broken nitrogen bonds were formed by decreasing the bilayer thickness of AlN/CrN multilayer
coatings. Existence of optimum AlN/CrN multilayer coatings thickness for maximum hardness
could be explained by the competition of softening by the formation of broken nitrogen bonds and
strengthening induced by decreasing bilayer thickness.
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