Strain evolution of each type of grains in poly-crystalline (Ba,Sr)TiO3 thin films grown by sputtering

Title
Strain evolution of each type of grains in poly-crystalline (Ba,Sr)TiO3 thin films grown by sputtering
Authors
박우영박민혁이종호윤정호한정환최정혜황철성
Keywords
(Ba,Sr)TiO3; Strain; sputtering
Issue Date
2012-12
Publisher
Scientific Reports
Citation
VOL 2, 939-1-939-8
Abstract
The strain states of [111]-, [110]-, and [002]-oriented grains in poly-crystalline sputtered (Ba,Sr)TiO3 thin films on highly [111]-oriented Pt electrode/Si substrates were carefully examined by X-ray diffraction techniques. Remarkably, [002]-oriented grains respond more while [110]- and [111]-oriented grains do less than the theoretically estimated responses, which is understandable from the arrangement of the TiO6 octahedra with respect to the stress direction. Furthermore, such mechanical responses are completely independent of the degree of crystallization and film thickness. The transition growth temperature between the positive and negative strains was also different depending on the grain orientation. The unstrained lattice parameter for each type of grain was different suggesting that the oxygen vacancy concentration for each type of grain is different, too. The results reveal that polycrystalline (Ba,Sr)TiO3 thin films are not an aggregation of differently oriented grains which simply follow the mechanical behavior of single crystal with different orientations.
URI
http://pubs.kist.re.kr/handle/201004/44349
ISSN
20452322
Appears in Collections:
KIST Publication > Article
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