Large in-plane permittivity of Ba0.6Sr0.4TiO3 thin films crystallized using excimer laser annealing at 300℃

Title
Large in-plane permittivity of Ba0.6Sr0.4TiO3 thin films crystallized using excimer laser annealing at 300℃
Authors
강민규Kwang-Hwan Cho도영호Young-Jin LeeSahn Nahm윤석진강종윤
Issue Date
2012-12
Publisher
Applied physics letters
Citation
VOL 101, NO 24, 242910-1-242910-4
Abstract
We demonstrated a way to fabricate the crystalline Ba0.6Sr0.4TiO3 (BST) thin films using excimer laser annealing technique on the amorphous BST thin films fabricated by sol-gel process. The grain size of the laser-annealed films is larger than that of the conventionally thermal-annealed films. However, an uncrystallized, amorphous layer was observed near the film/substrate interface due to the limited laser absorption depth. The uncrystallized layer has a critical influence on out-of-plane dielectric property of BST films. The significant difference of the relative dielectric permittivity (εr) between in-plane (1383) and out-of-plane (184) directions is observed.
URI
http://pubs.kist.re.kr/handle/201004/44351
ISSN
00036951
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE