Electrical Characteristics of Ba0.6Sr0.4TiO3 Thin-Film Chip Capacitors for Embedded Passive Components

Title
Electrical Characteristics of Ba0.6Sr0.4TiO3 Thin-Film Chip Capacitors for Embedded Passive Components
Authors
레자 파우리즈키 라하유강민규도영호황진하강종윤윤석진
Keywords
BST; capacitors; embedded; thin films
Issue Date
2013-01
Publisher
IEEE Electron Device Letters
Citation
VOL 34, NO 1, 99-101
Abstract
The single-layer 400 μm × 200 μm sized Ba0.6Sr0.4TiO3 thin-film embedded chip capacitors with two external electrodes fabricated on the surface of the chip capacitors have been demonstrated. The structure of the external electrodes placed on the same surface allows the reduction of connection length, resulting in low parasitic loss and noise of elecronic devices. The fabricated chip capacitors exhibited excellent electrical properties such as high capacitance density and dielectric constant (1687 nF/cm2 and 452) and a low dielectric loss of 0.052 at 1 kHz, respectively. In addition, the chip capacitors exhibited the superior temperature stability of X5R (ΔC/C = ±15% at −55 ◦C to +85 ◦C) characteristics. Such a low leakage current density of ~0.15 μA/㎠ at 3 V and a high breakdown voltage of 19.75 V were obtained as well. In conclusion, the chip capacitors are suggested as a candidate for the applications of embedded passive components.
URI
http://pubs.kist.re.kr/handle/201004/44398
ISSN
07413106
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE