Sensitivity enhancement of carbon nanotube based ammonium ion sensors through surface modification by using oxygen plasma treatment
- Sensitivity enhancement of carbon nanotube based ammonium ion sensors through surface modification by using oxygen plasma treatment
- 여상학; 최창록; 장지웅; 이석; 전영민
- Sensitivity; Carbonnanotube; Plasma treatment; Sensors; Surface modification; Ammonium ion; ICP-CVD; Plasma polymerization; HMDSO
- Issue Date
- Applied physics letters
- VOL 102, NO 7, 073108-1-073108-4
- We have shown that the sensitivity of carbon nanotube (CNT) based sensors can be enhanced as
high as 74 times through surface modification by using the inductively coupled plasma chemical
vapor deposition method with oxygen. The plasma treatment power was maintained as low as
10W within 20 s, and the oxygen plasma was generated far away from the sensors to minimize
the plasma damage. From X-ray photoelectron spectroscopy analysis, we found that the
concentration of oxygen increased with the plasma treatment time, which implies that oxygen
functional groups or defect sites were generated on the CNT surface.
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