Growth and Thermoelectric Properties of Multilayer Thin Film of Bismuth Telluride and Indium Selenide via RF Magnetron Sputtering

Title
Growth and Thermoelectric Properties of Multilayer Thin Film of Bismuth Telluride and Indium Selenide via RF Magnetron Sputtering
Authors
김효정김광천최원철김진상김영환김성일박찬
Keywords
Bismuth Telluride; Indium Selenide; Multilayer Thin Film; RF Magnetron Sputtering; Thermoelectric Films
Issue Date
2012-04
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 12, NO 4, 3629-3632
Abstract
A bismuth telluride (BT)/indium selenide (IS) multilayer film was deposited at room temperature by rf magnetron sputtering on a sapphire substrate in order to investigate how the multilayered structure affects the microstructure and thermoelectric properties. The effect of annealing at different temperatures was also studied. The results were compared with those from a BT film with the same thickness. A TEM study showed that the interface between the BT and IS layers became vague as the annealing temperature increased, and the BT layer crystallized while the IS layer did not. The presence of thin IS layers can help to limit the evaporation of Te from the BT/IS multilayer film, thus increasing the amount of Bi2Te3 phase in the multilayer film as compared with that of the BT film. An abrupt increase in the Seebeck coefficient of the multilayer film was observed when annealed at 300 ℃, and the resistivity of the annealed multilayer film was high compared to that of the BT film. This result can also be explained by the proposed role of the IS layer, which limits the evaporation of Te at high temperature. The highest power factor of ~3.9×10−6 W/K2 cm was obtained at room temperature from the multilayer film annealed at 300 ℃.
URI
http://pubs.kist.re.kr/handle/201004/44657
ISSN
15334880
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE