Selectively Self-Assembled Single-Walled Carbon Nanotubes Using Only Photolithography Without Additional Chemical Process

Title
Selectively Self-Assembled Single-Walled Carbon Nanotubes Using Only Photolithography Without Additional Chemical Process
Authors
김경헌김태근이석전영민김선호변영태
Keywords
SWCNT; Photolithography; SAM
Issue Date
2011-12
Publisher
Application of accelerators in research and industry
Citation
VOL 1399, 825-826
Abstract
In this paper, we investigated a novel method of selectively assembling single‐walled carbon nanotubes (SWCNTs) on a silicon (Si) substrate. These SWCNT arrays were fabricated by using only a photolithographic process. Using this technique, SWCNTs could be absorbed on the Si substrate surface without complicated chemical steps. As a result, we successfully fabricated SWCNT‐based multi‐channel patterns. The unmanageable SWCNTs could be easily absorbed on the Si02 surface. This is to advance one step further from the conventional self‐assembled process using octadecyltrichlorosilane (OTS). This technique will provide a useful basis for the implementation of nanostructure‐based field emission transistor (FET) devices. This new process can be used to fabricate SWCNT channels of FET devices.
URI
http://pubs.kist.re.kr/handle/201004/44666
ISSN
0094243X
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KIST Publication > Article
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