Selectively Self-Assembled Single-Walled Carbon Nanotubes Using Only Photolithography Without Additional Chemical Process
- Selectively Self-Assembled Single-Walled Carbon Nanotubes Using Only Photolithography Without Additional Chemical Process
- 김경헌; 김태근; 이석; 전영민; 김선호; 변영태
- SWCNT; Photolithography; SAM
- Issue Date
- Application of accelerators in research and industry
- VOL 1399, 825-826
- In this paper, we investigated a novel method of selectively assembling single‐walled carbon nanotubes (SWCNTs) on a silicon (Si) substrate. These SWCNT arrays were fabricated by using only a photolithographic process. Using this technique, SWCNTs could be absorbed on the Si substrate surface without complicated chemical steps. As a result, we successfully fabricated SWCNT‐based multi‐channel patterns. The unmanageable SWCNTs could be easily absorbed on the Si02 surface. This is to advance one step further from the conventional self‐assembled process using octadecyltrichlorosilane (OTS). This technique will provide a useful basis for the implementation of nanostructure‐based field emission transistor (FET) devices. This new process can be used to fabricate SWCNT channels of FET devices.
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